Wafer Holders

Holders for Etching

Holders for etching have no electrical contact system. For higher temperatures KOH and TMAH solutions the holder has to be made by more chemical resistant materials with air release system.

Holder Features & Functions

Safe holding and sealing with 3 mm edge exclusion

Simple substrate replacement in seconds

Waferthickness tolerances ±100µ

Compensation of higher tolerances by using a foil

Electrochemical Etching possible

All types of material possible for TMAH or KOH etching

Flexholder for different wafer thickness possible

Standard Holder 1,2,3,4,5,6,8 & 12''

Air release system available

Other sizes and forms available

Holder Samples

4″ Horizontal Etching

Etching

4″ Horizontal Etching with Air Release

Etching

6″ Plus with Air Release closed

Etching

6″ Plus with Air Release

Etching

8″ Trio Plus

Etching

8″ Trio Plus closed

Etching

All components used are available as spare parts. If required, please contact us directly.

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